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产品快速查找 Find a model number or product name
压力和真空产品
附件和软件 Cables, Filters, Valves, Secondary Electronics, Software
质量流量控制器和仪表
汽化产品
可变面积流量计(转子流量计)
半导体产品 Ultra-high purity products for the semiconductor industry
SLA5800 系列压力控制器拥有各种选件和功能,可帮助您实现压力控制自动化并通过与布鲁克斯业内领先的 SLA5800 系列质量流量控制器和仪表相结合利用单一平台的过程一致性优势。
SLA5800 系列产品特点是具有高精度、高零点稳定性以及高重现性,这得益于布鲁克斯的先进计量系统和方法(采用直接源于国际标准的基本流量校准系统)。
请与我们的应用工程专家取得联系:
联系电话: + 86-21-38720770 传真
得到报价
Pressure
±0.25% of Transducer FS (FS > 300 psia)±0.12% of Transducer FS (FS < 300 psia)
Flow
N/A
0.20% SP
±0.1% of FS per °C
Up to 50 lpm: 1500 psia / 100 bara
Up to 10 lpm: 4500 psia / 310 bara
Turndown 100:1 for FS from 1-50 lpm
50:1 for all other FS flows
System dependent
1 x 10-9 atm cc/sec He
Normally Closed
Normally Open
316L Stainless Steel
High Alloy Stainless Steel
Viton® fluroelastomers
Optional: Buna-N, Kalrez®, Teflon®/Kalrez®, and EPDM
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
DeviceNet™
Profibus®
RS-485
DeviceNet™ 1 x M12 with threaded coupling nut (B)
Profibus® 1 x 15-pin Male Sub-D 1 x 9-pin female Sub-D
RS485 1 x 15-pin Male Sub-D, (A)
Analog / Profibus® / RS485
Valve Orifice > 0.032": 8 Watts
Valve Orifice ≤ 0.032": 5 Watts
Without Valve: 2 Watts
Valve Orifice > 0.032": 10 Watts
Valve Orifice ≤ 0.032": 7 Watts
Without Valve: 4 Watts
Available
MFC Health
Network Status
Control Valve Output
Network Interruption
RS485 via 2.5mm jack
ATEX
IECEx
EMC Directive 2004/108/EC
CE: EN61326-1: 2006
RoHS Directive (2011/65/EU)
Medium
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: SLA5840 - A - 1B - 1 - C - RevB
Mechanical Connection (Body size 0 & 1 only)