产品类型
Pressure Controller & Flow Meter
区别
Remote Transducer
Pressure Control & Flow Measurement
流量范围-满量程容量
Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.
精度
Flow Accuracy:
±1% F.S. including linearity at the calibration conditions
±1.5% F.S. for flow rates greater than 20 slm
压力范围
Dependent upon remote pressure transducer
压力控制范围
100:1 for a remote transducer with a 0-10 V output
响应时间-常闭
Pressure Response Time:
< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.
Actual pressure response depends on system design.
接液材料
Wetted Parts: Standard 316L/316L VAR Stainless Steel
Valve Seat: Standard Viton® fluoroelastomers or metal
External/Internal Seals: flouroelastomers or metal
Optional: Buna-N, Teflon® or Kalrez®
阀门
Normally Closed
Normally Open
No Valve (elastomer, upstream configuration only)
电源-功耗
Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA
电磁兼容性
EMC Directive 89/336/EEC EN 61326-1