Pressure Controller & Flow Meter
Pressure Control & Flow Measurement
Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.
±1% F.S. including linearity at the calibration conditions
±1.5% F.S. for flow rates greater than 20 slm
Dependent upon remote pressure transducer
100:1 for a remote transducer with a 0-10 V output
Pressure Response Time:
< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.
Actual pressure response depends on system design.
Inboard to Outboard
Metal Seal: 1 x 10-10 atm cc/sec He max
Elastomer Seal: 1 x 10-9 atm cc/sec He max
Wetted Parts: Standard 316L/316L VAR Stainless Steel
Valve Seat: Standard Viton® fluoroelastomers or metal
External/Internal Seals: flouroelastomers or metal
Optional: Buna-N, Teflon® or Kalrez®
No Valve (elastomer, upstream configuration only)
Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA
EMC Directive 89/336/EEC EN 61326-1