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製品タイプ
Mass Flow Controller
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差別化要因
Highest Flow Accuracy
Highest Operating Temperature
Digital Communication
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流量範囲（フルスケール容量）
10 slm (N2 equivalent)
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精度
1% of SP@ 35 - 100% FS
0.35% of FS @ <35% FS
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Linearity
±0.5% FS (included in accuracy)
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Response Time - NC
<1 sec to within 2% of SP (per SEMI E17-91)
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Zero Stability
<±0.5% FS per °C
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Level of Purity
4 μ inch Ra
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Wetted Materials
316L SS/ KM-45/ 304 SS/ MO+
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Valves
Normally Closed
Meter (no valve)
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Differential Pressure Range
1.33 - 350 kPa (10 torr - 50 psia)
*Contact Brooks Technical Support for more information.
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Leak Integrity
1x10-10 atm cc/sec He
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デジタル通信
RS485 L-Protocol (via dual RJ11 ports)
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Electrical Connection
Analog via 9- or 15-Pin "D" connector & 20 Pin Card Edge connector
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Power Supply - Consumption
Controller (Analog & RS-485L): 5 Watts max @ ±15 Vdc (160 mA max)
Meter (Analog): 5 Watts max @ ±15 Vdc (50 mA max)