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VDM100 Vapor Delivery Module

Highest flow accuracy for ultra-high purity DI Water vapor control.
Models VDM100

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the delivery of ultra-high purity water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wide control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in the non-super-heated vapor stage, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

It also provides user-friendly data logging and diagnostic features via an independent service port and intuitive graphic user interface.


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  • Flow range: 3 slpm
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining


  • Utilizes proven, reliable thermal mass flow measurement and control technique
  • Highly tolerant of varying water supply pressure
  • Improved corrosion resistance
  • Ensures cleaner operation


  • Silicon semiconductor post-metal etch process
  • Silicon semiconductor metal strip process
  • Ultra-high purity humidification in sub-atmospheric environments
Product Type

DI Water Vapor Delivery Module



High Purity Vapor

Highest Flow Accuracy

Compact Design

Vaporization Method
Vapor Draw
Fluid Type
DI Water
Flow Range (Full Scale Capacity)

3000 sccm

Turndown Ratio
Response Time

<2 sec


±1% SP @ 10-100% FS

±5% SP @ 5 - <10% FS

±0.5% of FS
<±0.2% FS
Flow Temperature Coefficient
0.05% per °C zero and span
Valve Shut Down

Normally Closed Valve: <0.5% FS

Analog Communication

0 - 5 Vdc

0 - 24 Vdc (with dongle)

Digital Communication

RS485 via 2.5mm jack plug (diagnostic port)

Electrical Connection


Heater Power
260 Watts
Diagnostics & Display
Status Lights





Diagnostic / Service Port

RS-485 via 2.5mm jack


Outlet Vapor: 13/8" Female VCR

Inlet DI Water: 1/4" Male VCR or tube compression

Mounting Orientation
Vertical with DIW inlet fittings down
Max Pressure

Vapor Outlet: 200 torr

Supply Pressure

DI Water: 10 - 40 psig

N2 Purge: 10 - 40 psig

Ambient Temperature Range
15 - 45°C
Max Temperature
Internal Volume
0 to 95% RH, non-condensing
Fully CE compliant to EMC directive 89/336/EEC, EN 61326
Environmental Compliance
Compliant to EU directive 2002/95/EC

SEMI F47-0706

SEMI S2-0703

SEMI S8-1103

SEMI S14-1103

ULG1010-1 (UL Listed)

Flow Range (Full Scale Capacity)

3000 sccm


±1% SP @ 10-100% FS

±5% SP @ 5 - <10% FS

Repeatability <±0.2% FS
Response Time

<2 sec

Analog Communication

0-5 Vdc

0-24 Vdc (via dongle)

Digital Communication

RS-485 via 2.5mm jack plug


FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English