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Products Semiconductor Products High & Ultra-High Purity Gas Mass Flow Controllers & Meters GF80 Series
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GF80 Series

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Features

  • Long-term zero stability of <±0.5% full scale per year
  • <1 second settling times
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path - 16µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
  • Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Best-in-class temperature coefficient specification through active temperature compensation
  • Embedded self-test routines and independent diagnostic/service port
  • Slimline body with VCR fittings
  • DeviceNetTM, Profibus®, RS-485 and analogue interfaces

Benefits

  • Fast <1 second flow settling time eliminates wasted gas and process variability
  • No elastomer seals that can have oxygen permeation, requiring replacement over time
  • MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
  • New gases and/or ranges can be set in under 60 seconds
  • Measurement accuracy not affected by temperature variations
  • Convenient access to diagnostics port for maximum uptime
  • Compact size eases integration into tight machine spaces; excellent choice for retrofits
  • Multi-protocol communication interface simplifies integration into existing systems

Applications

  • Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
  • Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
  • MOCVD for LED and power device manufacturing
  • Solar/thin film chemical vapour deposition (CVD) systems
  • Analytical OEM equipment
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Product Type

Mass Flow Controller

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Differentiator
High Purity
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Performance
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Flow Range (Full Scale Capacity)
3 sccm - 300 slm
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Accuracy

±1% S.P. 35-100%

±0.35% F.S. < 5-35%

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Repeatability
< ±0.2% S.P.
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Linearity

±0.5% F.S. (included in accuracy)

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Response Time

Normally Closed Valve: <1 sec

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Multi-Gas & Range Configurability
MultiFlo™ Available
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Pressure Transient Insensitivity
—
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Control Range

< 5% - 100%

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Number of Bins

Standard GF Series: 11 bins

High Flow GF Series: 4 bins

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Valve Shut Down

Standard GF Series: < 1% F.S.

High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.

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Zero Stability
< ±0.5% F.S. per year
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Mechanical
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Seal Material
Metal
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Level of Purity / Surface Finish
16µ inch Ra
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Wetted Materials

316 Stainless Steel

Hastelloy C-22

17-7 PH

430SS

KM-45

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Valve Options

Normally Closed

Meter (no valve)

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Ratings
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Max Temperature
50oC
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Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 15-45 psid

7201-50000 sccm = 25-45 psid

51-300 slm = 30-90 psid

(typical pressure drops)

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Max Pressure

Standard GF Series: 150 psig (10 bar)

High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)

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Leak Integrity
1x10-10 atm cc/sec He
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Diagnostics & Display
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Diagnostic Capability
Available

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Status Lights
MFC Health, Network Status
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Alarms

Control Valve Output, Network Interruption

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Diagnostic / Service Port

RS485 via 2.5mm jack (all models)

 

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Electrical
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Analogue Communication

0-20 mA

4-20 mA

0-5 Vdc

0-10 Vdc

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Digital Communication

DeviceNet™ 

Profibus®

RS485 S-Protocol

RS485 L-Protocol

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Electrical Connection

Profibus/Analog via 9-Pin "D" connector

RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

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Power Supply / Consumption

Standard GF Series:   RS485 from +12 Vdc to +24 Vdc = 7 Watts max

                                       Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max

                                       DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max

High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max

                                       Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max

                                       DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max

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Compliance
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EMC

CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

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Environmental Compliance

Safety EN61010-1

RoHS

Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English Japanese
DeviceNet™ Supplemental Manual pdf English
EtherCAT® Supplemental Manual pdf English
RS485 A-Protocol Supplemental Manual pdf English
RS485 L-Protocol Supplemental Manual pdf English
RS485 S-Protocol Supplemental Manual pdf English
Use the model code information from the data sheet to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
0250 Series
0250 Series
Controls and powers up to 4 devices
0260 Series
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
MultiFlo™ Configurator
MultiFlo™ Configurator
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.
Smart DDE
Smart DDE

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.