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High & Ultra-High Purity Gas Mass Flow Controllers & Meters

Challenge: Maximize tool uptime and productivity

The reliability and versatile performance of mass flow controllers is fundamental to many semiconductor process tools. Process tools only earn returns on their multi-million dollar investment when up and running; if an MFC drifts beyond crucial set points, or new fabrication processes require multiple gases (and multiple MFCs), downtime for changeovers and/or recalibration or repair escalates.

Solution: Advanced MultiFlo®-capable GF Series MFCs

Accurate, repeatable delivery of process gases with ultra-high levels of purity – that’s the performance the GF Series of metal seal mass flow controllers and meters provides. The GF Series has been marathon tested to seven times semiconductor industry standards for reliability. An all-metal flow path and corrosion-resistant Hastelloy® sensor ensures the highest level of gas purity and moisture-free flow. And the unique programmable MultiFlo® technology enables one MFC to support thousand of gas types and range combinations.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.


GP200 Series
GP200 Series
GF100 Series EtherCAT
GF100 Series EtherCAT
GF100 Series
GF100 Series
Product Type

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller


Fully Pressure Insensitive P-MFC

Most Precise Process Gas Delivery Over the Widest Range of Operating Conditions

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

High Purity/Ultra-High Purity

Standard GF Series

High Flow GF Series

Ultra-Fast Response Time

Pressure Transient Insensitivity

Seal Material


Metal Metal
Level of Purity / Surface Finish 5µ inch Ra avg

5 - 10µ inch Ra

4 - 10µ inch Ra
Flow Range (Full Scale Capacity)

3 sccm - 50,000 sccm

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

Standard GF Series: 3 sccm - 55 slpm

High Flow GF Series: 55 slpm - 300 slpm


Zero Leak Valve

1% S.P. (5-100% F.S.)

0.05% F. S. (0.5-5% F.S.)

Metal Seal Valve

1% S.P. (5-100% F.S.)

0.05% F. S. (2-5% F.S.)

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

Max Pressure

150 psia

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Standard GF Series: 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Max Temperature 60oC 50oC 50oC
Analogue Communication

0-5 Vdc

0-5 Vdc

Digital Communication



RS-485 L-Protocol



RS485 L-Protocol