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VersaTorr BVT100 Series Pirani Transducers

Ultra-wide range pirani/piezo transducer with an atmospheric switch function.

The VersaTorr BVT100/125 Series Pirani Transducers offers best-in-class performance and has established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.

The VersaTorr BVT100/125 Series is based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms. Together with precision automated manufacturing and calibration processes, these elements in combination provide a unique product capable of uncompromised measurement performance.

The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.

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BVT100 Series Data Sheet

Features & Benefits

  • Ultra-wide measuring range of 9 decades
  • Advanced digital signal processing provides unmatched price performance ratio
  • Gas independent diaphragm sensor from 2 to 1333 mbar
  • Easy configuration via Brooks Vacuum Transducer Communicator USB programmer
  • Ultra-Stable Zero-point drift compensation
  • Optional solid state setpoint relay for process control

Applications

  • Load locks
  • Transfer chambers
  • Forelines
  • Vacuum roughing lines
  • Thin film processing
{DD1B7F6C-F7DF-44BB-A3C6-A0DBE8F761D3}
Product Type
Pirani Transducer
{D8B7BC4C-9176-488D-ADB3-7C6E443AAC77}
Differentiator

Dual Sensor: MEMS Pirani and Piezo Diaphragm

{378EF43C-99C4-41B2-B2B8-B29E6695C562}
Performance
{E792D1D2-AE76-468E-BFD2-BA280D567CDA}
Temperature
Ambient - 50 oC
{D770620D-9592-4F01-9DD9-C21DE5BD706E}
Pressure Range

7.5x10-7 Torr through 1000 Torr

{A3880E0F-4422-4FB7-9378-DED49FD4E41F}
Accuracy

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±5%

7.50 to 7.49 Torr: ±1%

75 Torr to 1000 Torr: ≤±0.5%

{5F85AC38-92CF-4BAC-987E-C773972A727A}
Measurement Range
9 decades
{41BE75D3-A57E-4D21-A4B4-02BC693ADF2B}
Temperature Effect

Ambient - 50 oC

{86A79437-1797-40C3-AB0D-19E3081EF036}
Mechanical
{C57D92CF-393C-4B2E-B396-77A7CC57C4C6}
Exposed Materials
304 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
{2C2CD340-A5FE-4842-8DDF-0C0F3B5BEB7F}
Over Pressure Limit
10 bar absolute
{1BF501C1-1709-40AC-B41D-EA75C74207F0}
Electrical
{AA27A7AB-AB3A-4855-97CA-10541FEBDEA4}
Analogue Communication

0.5-9.5 Vdc (1V per decade)

{C782E4AB-A27A-4346-B6B2-926BAEB2C6D7}
Digital Communication

RS-232

RS-485

{E7C348C9-C9D3-4120-8714-636A08B8FE24}
Electrical Connection

9 Pin D-sub male

15 pin HD D-sub male

15 pin HD D-Sub male / dual analog out

6 pin Hirschmann, ID res 3K

6 pin Hirschmann, ID res 5.1K

6 pin Hirschmann, ID res 9.1K/11.1K

8 pin RJ45 / FCC68, ID Res 27K

8 pin RJ45 / FCC68, ID Res 36K

8 pin RJ45 / FCC68, ID Res 43K

{AE2C0F89-82B9-49A6-989E-74A3945C04E1}
Power Supply / Consumption
240 mW (max)
{FE510608-BDE7-4629-982B-FAA8602D4694}
Certifications/Approvals
{FC27B510-25AE-49D1-A902-C7CBC1F66090}
EMC
Directive EU 2015/863 EMC directive 2014/30/EU
{6752273E-7F70-41C2-B6E2-3F8F421CE248}
Filename File Type Documents By Language
Data Sheet - BVT100 pdf English
Data Sheet - BVT125 pdf English