High purity flow path. Superior repeatability, stability and response time.
The Brooks model SLA7840 is a high purity metal sealed instrument that controls pressure while measuring flow rate. A remote pressure transducer signal, along with adjustable integral PID control electronics and a co-planar control valve, maintains the desired set pressure. The co-planar valve reduces sensitivity to pressure variations and offers lower leak-by rates compared to other metal sealed controllers ensuring a more stable process over time.