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Products Pressure & Vacuum Capacitance Manometers XacTorr® Series
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XacTorr® Series Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.
Models CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

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XacTorr® Series Data Sheet

Features

  • Available for process ranges from 0.10 Torr to 1000 Torr
  • Multiple accuracy levels available
  • Patented Mark IV sensor
  • Digital architecture enables operation over a wide dynamic range with extremely good accuracy
  • Dual-zone temperature control improves measurement stability and repeatability
  • Multi-decade digital calibration provides superior window of known accuracy
  • Intelli-touch zero adjustment
  • Independent & easily accessible diagnostic service port
  • DeviceNet® and analog communication options

Benefits

  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Applications

  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
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Product Type
Capacitance Manometer
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Differentiator

Heated or Unheated

Analog or Digital

 

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Performance
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Temperature

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

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Pressure Range

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available

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Accuracy

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

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Measurement Range
4 Decades
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Temperature Effect

On Zero

0.002% FS / °C

 

On Span

0.02% FS / °C

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Mechanical
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Exposed Materials
Inconel® and/or AISI 316L Stainless Steel
{98A62AB2-5BC8-419D-8938-9B7B0041BAD4}
Over Pressure Limit
17 psia or 125% of Full Scale, whichever is greater
{1E395057-E164-4942-B420-C5C8FFFE67A3}
Size
Large
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Electrical
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Analogue Communication
0-10 Vdc 5k Ohm load
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Digital Communication

DeviceNet™

RS485

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Electrical Connection

Analog/RS485 via 9-Pin or 15-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Various cable adaptors available. See product data sheet for more information.

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Power Supply / Consumption

CMX0 power required is 200 mA @ ±15 Vdc

Power Input at Initial Warm-up Analog Models, Typical Values1: CMX1 - 270 mA@±15 Vdc (±5%); CMX2 - 620 mA @ ± 15 Vdc (±5%)

Power Input at Steady State Analog Models, Typical Values1:CMX1 - 175 mA @ ±15 Vdc (±5%);     CMX2 - 350 mA @ ± 15 Vdc (±5%)

Power Input at Initial Warm-up DeviceNet Models, Typical Values: CMX1 - 400 mA @ 24 Vdc;        CMX2 - 900 mA @ 24 Vdc

Power Input at Steady State DeviceNet Models, Typical Values: CMX1 - 300 mA @ 24 Vdc               CMX2 - 600 mA @ 24 Vdc

1. 15-Pin Male Sub D Model requires an additional 40 mA to power the internal relays (if energized).

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Certifications/Approvals
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EMC
Fully CE Certified to EMC Directive 89/336/EEC
CMX0 CMX1 CMX2 CMX3
Temperature Ambient 45oC 100oC 160oC
Pressure Range 1, 2, 10, 20, 100, 1000 Torr 0.1, 1, 2, 10, 20, 100, 1000 Torr 0.1, 1, 2, 10, 20, 100, 1000 Torr 1, 2, 10, 20, 100, 1000 Torr
Accuracy

0.25% of Reading

0.15% of Reading

1 - 1000 Torr Ranges

 

0.25% of Reading

<1 Torr Ranges

0.15% of Reading

1 - 1000 Torr Ranges

 

0.25% of Reading

<1 Torr Ranges

0.50% of Reading

1000 Torr Ranges

 

0.25% of Reading

10 - 100 Torr Ranges

 

0.35% of Reading

1 - 2 Torr Ranges

 
Analogue Communication

0 - 10 Vdc

RS485

0 - 10 Vdc

RS485

0 - 10 Vdc

RS485

0 - 10 Vdc

RS485
Digital Communication

RS485

DeviceNet

RS485

DeviceNet

RS485

DeviceNet

RS485

DeviceNet
Filename File Type Documents By Language
Data Sheet pdf English
Data Sheet - CMX160 pdf English
Installation & Operation Manual pdf English
DeviceNet™ Supplemental Manual - XacTorr® Series pdf English
CE EU Declaration of Conformity Certificate pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: CMX - 0 - XXX - 2 - 2

Capacitance Manometer
 		 Temperature

Flow Range

Electrical Connector
 		 Fitting

CMX

 

 

 

 

 0 - CMX0 (Ambient)

1 - CMX45 (45°C)

2 - CMX100 (100°C)

 

 

XXX - Full Scale Range

See data sheet for complete listing.

 

 

 

 2 - 15 Pin Male Sub D 

 See data sheet for complete listing.

 

 

 

2 - KF 16  Flange

3 - KF 25 Flange

4 - 8 VCR (1/2") Female

5 - Mini CF

See data sheet for complete listing.


XacTorr® GUI
XacTorr® GUI
An independent means of communicating with the capacitance manometer without interrupting tool communications.