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Capacitance Manometers

Advanced manometer technology delivers sustained vacuum accuracy.

Every vacuum pressure gauge and chamber process has a precise Torr level it must reach to sustain process yields. With industry-leading advanced sensor design features, capacitance manometers from Brooks Instrument are designed to improve manometer measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. And because these vacuum pressure gauges are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. The result is an exceptionally reliable family of manometers and vacuum pressure gauges for all vacuum measurement applications.


  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Select the capacitance manometer that best meets your project requirements.


CMC Series
CMC Series
XacTorr® Series
XacTorr® Series
Product Type Capacitance Manometer Capacitance Manometer


Heated or Unheated

Analog or Digital


Pressure Range

10, 20, 50, 100 and 1000 Torr Full Scale

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available


Type A = 0.25% of Reading

Type B = 0.50% of Reading

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Temperature Ambient

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

Analogue Communication

0-10 Vdc (<10k Ohm load)

0-10 Vdc 5k Ohm load
Digital Communication



Size Compact Large