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Pressure & Vacuum Measurement Instruments

Innovative vacuum and pressure measuring instruments. World-class accuracy and reliability.

Wondering how to control pressure in your industrial applications? Any time you are measuring flow, you probably also need to measure pressure or vacuum – and we can help. For decades, Brooks Instrument has been a leader in flow measurement and control technology. Today, we are a global leader in precision fluid measurement and control that includes a proven portfolio of pressure instrument and vacuum transducers, gauges, controllers, regulators and capacitance manometers to satisfy the most demanding process requirements.

Featuring world-class accuracy and repeatability, our vacuum and pressure control products can help you fine-tune the results your processes deliver.

Our vacuum and pressure controller technology is used by semiconductor OEMs, gas cabinet suppliers and vacuum controller system manufacturers including thin-film deposition systems and high-tech specialty furnaces. Our portfolio includes regulators and sensors that precisely measure and control pressures ranging from vacuum to 3000 psi; we have technology that will solve your gas and vacuum sensing and regulating challenges with:

  • Ultra-high purity pressure and vacuum transducers for the most stringent gas measuring challenges
  • Stainless steel pressure control gauges, switches and transmitters for local measurement that is accurate and cost-effective
  • Industry-leading, high-accuracy capacitance manometers for controlling the most critical vacuum processes
Brooks SolidSense II Pressure Transducer Cutaway
SolidSense II® - Pressure Transducer
Pressure Range
-15 psi - 4,000 psi
1% Full Scale
Materials of Construction
Aluminum or Stainless Steel
Pressure Range

-15 psi - 3000 psi


0.25 % Full Scale

Max Pressure
4500 psia
Max Temperature
Max Pressure
500 psig
Pressure Range

100 mTorr- 1000 Torr


0.15 - 0.2% of Reading

Temperature Range
Ambient - 160 oC
Pressure Range

7.5x10-7 to 1000 Torr


0.25 - 0.5% of Reading

Ambient - 50 oC