Gerätetyp
Mass Flow Controller
Unterscheidungsmerkmal
Highest Flow Accuracy
Highest Operating Temperature
Digital Communication
Durchflussbereich (Maximalwert)
10 slm (N2 equivalent)
Genauigkeit
1% of SP@ 35 - 100% FS
0.35% of FS @ <35% FS
Wiederholbarkeit
<±0.15% FS
Linearität
±0.5% FS (included in accuracy)
Ansprechzeit – Stromlos geschlossenes Ventil
<1 sec to within 2% of SP (per SEMI E17-91)
Nullstabilität
<±0.5% FS per °C
Reinheitsgrad
4 μ inch Ra
Medienberührte Teile
316L SS/ KM-45/ 304 SS/ MO+
Ventil
Normally Closed
Meter (no valve)
Maximale Temperatur
150oC
Differenzdruckbereich
1.33 - 350 kPa (10 torr - 50 psia)
*Contact Brooks Technical Support for more information.
Leckrate
1x10-10 atm cc/sec He
Digitale Kommunikation
RS485 L-Protocol (via dual RJ11 ports)
Elektrischer Anschluss
Analog via 9- or 15-Pin "D" connector & 20 Pin Card Edge connector
Spannungsversorgung
Controller (Analog & RS-485L): 5 Watts max @ ±15 Vdc (160 mA max)
Meter (Analog): 5 Watts max @ ±15 Vdc (50 mA max)