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APC|M 2018: Brooks Instrument Technology Expert to Speak About New Mass Flow Controller With Self-Diagnostics

February 08, 2018
Brooks Chief Technology Officer to deliver a technical presentation on the newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics monitoring.

Brooks Instrument Adds FOUNDATION™ Fieldbus Transmitter to Its MT3809 Series Variable Area Flow Meters

March 14, 2018
New transmitter for digital communications protocol makes it easier to integrate the popular MT3809 flow meter with automation control systems across the plant enterprise.

CSTIC and SEMICON CHINA 2018: Brooks Instrument to Present New Mass Flow Controller With Self-Diagnostics

February 08, 2018
Technology experts to deliver presentation and exhibit newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics

A New Class of MFCs with Embedded Flow Diagnostics

December 06, 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

July 11, 2016
Powerfully enhanced GF100 Series MFCs will help improve semiconductor process performance, productivity and yields.