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金属密封热式质量流量控制器和仪表

最高纯度气路。超高精确,无污染的控制。

现今许多高级电子元器件的加工工艺都需要能够对昂贵的超纯气体和液态前体进行相当准确并且具有高度可重现性的测定和控制。因此,布鲁克斯仪器推出了自家的革命性金属密封热质量流量控制器和仪表来满足上述需求。该产品将稳定性和准确性超高的测量传感器与快速、精准的控制阀以及功能强大的电子元件相结合共同实现了精准的化学品控制。高完整性(无泄漏)的超高纯度全金属流路可确保过程化学品纯度,该流路专为防止外部污染(如湿气和氧气)腐蚀过程媒介而设计。

关键应用

  • 硅材料半导体器件制造工艺 – 蚀刻、剥膜、CVD、ALD、PVD、Epi、扩散、植入和 RTP
  • 化合物半导体器件加工工艺 – MOCVD
  • 精密的表面涂层
  • 分析系统
  • 真空处理应用

选择最适合自身工艺需求的质量流量设备。

产品

GF135 系列
GF135 系列
GF125 系列
GF125 系列
GF100 系列
GF100 系列
GF80 系列
GF80 系列
5850EM 系列
5850EM 系列
产品类型 Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller
区别

Real-Time Flow Error Detection

Advanced Diagnostics

Ultra-High Purity

Ultra-Fast Response Time

Pressure Transient Insensitivity

High Purity/Ultra-High Purity

Standard GF Series

High Flow GF Series

High Purity

Large installed base with proven long term performance

流量范围-满量程容量-液体
密封材料

Metal

Metal

Metal Metal Metal
纯净等级 4µ inch Ra
4 - 5µ inch Ra 4 - 10µ inch Ra 16µ inch Ra

316L VAR, 316L, and high alloy ferritic stainless steel

精度

±1% S.P. 10-100% F.S.

±1% S.P. plus ±0.04% F.S. 2-10% F.S.

±1% S.P. > 35-100%

±0.35% F. S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. 35-100%

±0.35% F.S. < 5-35%

1% F.S. incl. linearity

1.5% F.S. incl. linearity >20 slpm

重复性 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P. < ±0.2% S.P.

0.2% of rate

响应时间-常闭

<300 ms (<860 sccm N2 equivalent)

<400 ms (861-5000 sccm N2 equivalent)

(to within ±2% FS)

<300 ms (<860 sccm N2 equivalent)

<400 ms (861-5000 sccm N2 equivalent)

(to within ±2% FS)

<300 ms (<860 sccm N2 equivalent)

<400 ms (861-5000 sccm N2 equivalent)

(to within ±2% FS)

300ms - < 1 sec

Normally Closed Valve: 700 ms - < 1 sec

SDS Gas Delivery: < 3 sec

Normally Closed Valve: <1 sec

Normally Closed Valve: <3 sec

Optional: 600 msec

瞬时压力波动不敏感

< 1% S.P. for up to 5 psi/sec upstream press. spike

<5% S.P. for up to 5 psi/sec upstream press. spike

多气体多量程

MultiFlo™ Standard (most models) MultiFlo™ Standard (most models) MultiFlo™ Available

诊断能力 Available

Available

Available

Available

模拟通讯

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-20 mA

4-20 mA

0-5 Vdc

0-10 Vdc

4-20 mA

0-5 Vdc

数字通讯

DeviceNet™

RS485

DeviceNet™

RS485 L-Protocol

DeviceNet™

RS485 L-Protocol

DeviceNet™ 

Profibus®

RS485 S-Protocol

RS485 L-Protocol

RS485 A-Protocol (GF081)