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Pressure & Vacuum Products

Innovative pressure and vacuum measurement instruments. World-class accuracy and reliability.

Any time you are measuring flow, you probably also need to measure pressure or vacuum – and we can help. For decades, Brooks Instrument has been a leader in flow measurement and control technology. Today, we are a global leader in precision fluid measurement and control that includes a proven portfolio of pressure and vacuum gauges, transducers, controllers, regulators and capacitance manometers to satisfy the most demanding process requirements.

Featuring world-class accuracy and repeatability, our pressure and vacuum products can help you fine-tune the results your processes deliver.

Our pressure and vacuum technology is used by semiconductor OEMs, gas cabinet suppliers and vacuum system manufacturers including thin-film deposition systems and high-tech specialty furnaces. Our portfolio includes regulators and sensors that precisely measure and control pressures ranging from vacuum to 3000 psi; we have technology that will solve your gas and vacuum sensing and regulating challenges with:

  • Ultra-high purity pressure transducers for the most stringent gas measuring challenges
  • Stainless steel pressure gauges, switches and transmitters for local measurement that is accurate and cost-effective
  • Industry-leading, high-accuracy capacitance manometers for controlling the most critical vacuum processes
SolidSense II Pressure Transducer Cutaway

SolidSense II, Pressure Transducer
Capacity
60, 100 or 300 lbs
Size
Compact
Certifications/Approvals

FM and ATEX

Pressure Range
-15 psi - 4,000 psi
Accuracy
1% Full Scale
Materials of Construction
Aluminum or Stainless Steel
Pressure Range

-15 psi - 3000 psi

Accuracy

0.25 % Full Scale

Certifications/Approvals
CE, FM and ATEX
Max Pressure
4500 psia
Max Temperature
65°C
Max Pressure
500 psig
Temperature
65°C
Pressure Range

100 mTorr- 1000 Torr

Accuracy

0.15 - 0.2% of Reading

Temperature Range
Ambient - 160 oC