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Elastomer Sealed Thermal Mass Flow Controllers & Meters

Proven flexibility for a wide range of mass flow needs.

Our elastomer sealed mass flow meters and controllers combine the accuracy, reliability and repeatability your processes require with cost-effective instruments that deliver precise performance and long-term stability. The result: You will maximize the value and return on investment your operations require.

Key Applications

  • Chemical and petrochemical analysis and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Thin film vapor deposition
  • Heat treating, cutting and other thermal processes
  • Vacuum applications
Select the mass flow device that best serves your process requirements.

PRODUCTS

5700 Series
5700 Series
5850E and i Series
5850E and i Series
4800 Series
4800 Series
GF40 Series
GF40 Series
SLA Series
SLA Series
SLAMf Series
SLAMf Series
Product Type Mass Flow Meter Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller
Differentiator

Economical

Compact

Ideal Upgrade from Volumetric Devices

Fast Response to Command Changes

Insensitive to Mounting Attitude

Wide Flow Range

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Flow Range (Full Scale Capacity)

0  - 50 lpm

0 - 1000 slpm

50 sccm - 40 slpm 3 sccm - 50 slpm .003 - 2500 lpm .003 - 2500 lpm
Seal Material

Stainless Steel

Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal
Max Pressure

150 psig

Controllers: 1500 psig

Meters: up to 4500 psig on some models

150 psig/10 barg

150 psig/10 bar

.003-100 slpm: 1500 psi/100 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

Accuracy

5% F.S. including linearity

1% F.S.

1.5% F.S. > 20 slpm

3.0% F.S.

1.0% F.S. (optional)

1% of S.P. 35-100%, .35% F.S 2-35%

0.9% of S.P. (20-100% F.S.)

0.18% of S.P. (2-20% F.S.)

1-50 slpm: 0.18% of S.P. (1-20% F.S.)

1100 slpm up to 2500 slpm: 1.0% of F.S.

Up to 100 lpm: 0.90% S.P. (20-100% FS)

0.18% of F.S. (2-20% FS, 1-20% FS from 1 - 50 lpm)

100 - 2500 lpm: 0.90% S.P. (20-100% FS)

100 - 1100 lpm: 0.18% of F.S. (2-20% FS)

1100 - 2500 lpm: 1.0% of FS

Repeatability

0.50% FS

0.25% of Rate

0.15% FS

0.20% SP

0.20% SP

0.20% SP

Multi-Gas & Range Configurability

MultiFlo™ Available

Standard

Standard

Diagnostic Capability

Available

Available

Available

Available

Analog Communication

0-5 V into 1000 ohms or greater

0-5 Vdc
0-20 mA
4-20 mA

0-5 Vdc
4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



Digital Communication



RS232

DeviceNetTM
EtherCAT®
Profibus®
RS485

DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485 

DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485





Size

Compact

Medium

Compact

Compact Medium Large
Certifications/Approvals

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

CE: EMC Directive 2004/108/EC

UL (Recognized): Class I, Div 2, Group A, B, C, D

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

CE: EMC Directive 2004/108/EC

UL (Recognized): Class I, Div 2, Group A, B, C, D

ATEX: II 3 G Ex nA IIC T4 Gc

ATEX: II 3 D Ex ic IIIC T85°C Db

IECEx: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 D Ex ic IIIC T85°C Db

Price

$

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