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SEMICON West 2013
San Francisco, CA, Booth #1347 in South Hall - July 9-11, 2013
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The Brooks Mf™ and SLAMf Series mass flow meters and mass flow controllers are designed specifically for use in harsh environments. Their unique NEMA4X/IP66 enclosure provides protection from dust and water making them ideal for indoor and outdoor use and perfect for hose down/washdown applications. The integrated sensor, valve and PID make these mass flow meters and flow controllers a cost-effective solution for hazardous area installations.
Brooks SLMf series digital thermal mass flow meter & thermal mass flow controller products are designed specifically for use in harsh environments. These devices’ unique NEMA 4X/1P66 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for a variety of service areas.