Global Support Centers
Brooks Instrument operates first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration.For a complete list of the Service Offerings available in your area, please choose the location nearest you below:
More Info at a Glance:
- North America
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Brooks Instrument Thermal Mass Flow products (TMF) are available for services of calibration, reconditioning, and reconfiguration at these locations with two levels of service;
- Level 1 Service involves purge and calibration only at a reduced cost.
- Level 2 Full Service and repair includes inspection, repair, reconditioning, calibration and reconfiguration services. Complete diagnostic review available upon request.
All of our North American support centers offer the following services:- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Failure Analysis Reports
- Technical Support, On-site start up, field calibrations, and training services
Capabilities Overview
Hatfield, PA
- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow, variable area and Quantim Coriolis mass flow products. Thermal mass flow products serviced: Analog, Smart Analog, Delta, Smart II product series
- NIST Certification
- High Flow Calibrations up to 2400 SLPM N2 equivalent
- Up to 1500 PSIG inlet pressure
- Direct gas calibration: N2, H2, Argon, Helium, CO2, Air
Capabilities Overview

Phone: 888-554-3569
Austin, TX
- Calibration, recondition and reconfiguration of Brooks Instrument Thermal Mass Flow Controllers products. Thermal mass flow products serviced: Analog, Smart Analog, Delta, Smart II product series
- Class 100 clean room
- NIST certification
- Flow rates up to 30 SLPM N2 equivalent
- Up to 350 PSIG inlet pressure
- Direct gas calibration: N2, Argon, Helium

Phone: 512-873-8000
- Europe
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Ede, The Netherlands
Services
- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow, variable area and Quantim Coriolis mass flow products. Thermal mass flow products serviced: Analog, Smart Analog, Smart II product series
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Failure Analysis Reports On-site start up services, field calibrations, and training services
- Technical Helpdesk service for all products during general office hours
- Fast turnaround. Rush order handling upon customer request (Next day service or "bring and take")
- Diagnostic review and price quotation upon customer request
Capabilities Overview
- NMI Certification
- High Flow Calibrations up to 2400 SLPM N2 equivalent
- Up to 100 bar (1500 psi) inlet pressure
- Direct gas calibration: N2, H2, Argon, Helium, CO2

After Sales & Service Data Sheet
Service & Repair coordinator
Phone: +31 (0)318 549292 or +31 (0)318 549291
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Technical Helpdesk
Phone: +31 (0)318 549290
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Dresden, Germany
Services
- Calibration, repair and reconfiguration of Brooks Instrument thermal mass flow products. Thermal mass flow products serviced: Brooks GF1XX product series, Celerity legacy devices analog and digital
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Failure Analysis Reports
- On-site start up services, field calibrations, and training services
- Technical Helpdesk service for all products during general office hours
- Fast turnaround. Rush order handling upon customer request (Two days service or "bring and take")
- Diagnostic review and price quotation upon customer request
Capabilities Overview
- Class 100 / 1000 clean room
- Digital Calibration Platform calibrations (GF1XX series, IntelliFlow series, IFC series)
- DataCal calibrations (Unit analog, digital series)
- CDG calibrations (CMX, CDL series)
- SDS calibrations (Unit 1662, 8162 series)
- Flow calibrations up to 30 SLPM N2 equivalent (Tylan, Millipore, Mykrolis analog digital series)
- High flow calibrations up to 200 SLPM N2 (Tylan, Millipore, Mykrolis analog series)
- Direct gas calibration: N2, H2, Ar, He, CO2, C2H6, C2H4, SF6, CH4, CF4, CHF3
Service & Repair coordinator
Phone: +49(0)351 2152040
E mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it or This e-mail address is being protected from spambots. You need JavaScript enabled to view it
Technical Helpdesk English
Phone: +353 (0)877 993355
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Technical Helpdesk German
Phone: +49 (0)351 21520442
E mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it - China
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Shanghai, China
Services- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow products. thermal mass flow products serviced:
- Analog: 5850/5860E & I Series including 51/61, 53/63 and 5864
- Smart Series: 5850/5860S, including 51/61, 53/63 and 5864
- Smart II Delta Series
- SLA 7950D, SLA7950S
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Technical Support, On-site start up
Capabilities Overview- Class 100 clean room
- Flow rates up to 30 SLPM N2 equivalent
- Up to 350 PSIG inlet pressure
- Direct gas calibration: N2

Phone: 86-21-3895 4788
Please call the China Support Center to Request a RMA
- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow products. thermal mass flow products serviced:
- Japan
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Tokyo, Japan
Services
- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow, variable area flow meter and Quantim products. Thermal mass flow meter/controllers serviced: Analog, Smart Analog, Delta, Smart II product series
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Failure Analysis Reports
- Technical Support, On-site start up, and training services
Capabilities Overview- Class 100 clean room
- High Flow Calibrations up to 2400 SLPM N2 equivalent
- Up to 1500 PSIG inlet pressure
- Direct gas calibration: N2, H2, Argon, Helium, CO2

Phone: 81 (3) 5633-7104
Please call the Japan Support Center to Request a RMA
- Korea
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Suwon City, Korea
Services
- Calibration, recondition and reconfiguration of Brooks Instrument thermal mass flow and Quantim Coriolis mass flow products. Thermal mass flow meters/controllersserviced: Analog, Smart Analog, Delta, Smart II product series
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Failure Analysis Reports
- Technical Support, On-site start up, and training services
Capabilities Overview- Class 100 and Class 10,000 clean rooms
- Flow rates up to 30 SLPM N2 equivalent
- Up to 350 PSIG inlet pressure
- Direct gas calibration: N2, Argon, Helium

Phone: 82-31-2232321
Please call the Korea Support Center to Request a RMA