- 1. Allow the device to be powered for at least 45 minutes so the electronics will be at normal operation condition.
- Using your process fluid, set VOR (valve override) open to start flow and fill the Quantim.
- If process fluid is liquid, allow to flow long enough to purge any air or gas bubbles from the lines and device. On very low flow devices, cycling the valve between 0 and 100% repeatedly may aid in removing entrapped gas from the device.
- Close down stream shut-off valve.
- Wait approximately 2 minutes for flow signal to drop to zero.
- Set VOR off and Setpoint to 0 and wait for signal stabilization.
- Device should be full of liquid with no pressure differential and no vibration.
- Press Zero button until Status LED flashes RED.
- Successful Zero = Green LED
- Failed Zero = Red LED (cycle power)
There are several reasons that the flow output of your thermal mass flow controller might not match the setpoint command:
- If the output signal stays at zero regardless of the setpoint command and there is flow through the device the sensor may be clogged.
- If the output signal stays at zero regardless of the setpoint command and there is no flow through the device the valve override close function may be engaged or the device may not be connected to the setpoint source properly.
- If the output signal stays at zero regardless of the setpoint command and there is no flow through, there may be a closed positive shut off valve in the line or the valve orifice may be clogged.
- If the output signal follows the setpoint command at higher commands but will not control at lower commands there may be leak past the control valve.
- If the output signal follows setpoint at lower commands but does not reach full scale there may be insufficient inlet pressure or pressure drop or a partially clogged sensor.
Brooks Instrument MFCs are custom built, calibrated and tuned at the specific process conditions provided at the time of purchase or repair.
Verify that your device is being operated according to the specific conditions on the order. If you’re unsure of the device's required conditions or need further assistance, contact our Technical Service team for help.
Please be prepared to provide the device Serial number and Reference number from the product label.
If storing a device for more than one month, do so in accordance with the following:
- In the original vacuum bag and shipping container
- In a sheltered area with the following conditions
- Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum and 7°C (45°F) minimum
- Relative humidity 45% nominal, 60% maximum and 25% minimum
The next key issue is the operating expectations of the device when removed from storage. The key factors that affect accuracy and performance over time are not present when the device is kept in proper storage condition. Some of these factors are:
- Normal wear on valve components
- Contaminant build-up on the restrictor assembly
- Long term electronic component degradation, particularly in a high temperature environment
- Long term sensor signal drift inherent in the thermal aging characteristic over time
When the device is stored under the described conditions, there should be no degradation of electronic or mechanical components.
There should also be no detrimental effects to the measurement accuracy of the device after it is removed from the recommended storage conditions. Once removed from storage, the device can be installed into its intended process application, powered-up, allowed to warm-up, zeroed, and it should then accurately measure and control flow within its operating specifications.
If you have concerns about the degradation of the seals and o-rings in your device, then we advise returning the device for inspection after 5 years of storage.
- At 500 slpm (3" LFE), the pressure loss = 0.87 psi = 45 torr
- At 1100 slpm (3" LFE), the pressure loss = 2.79 psi = 144 torr
- At 1500 slpm (1" LFE), the pressure loss = 1.42 psi = 74 torr
- At 2500 slpm (1" LFE), the pressure loss = 3.20 psi = 165 torr
If you have concerns about pressure loss in your system, please contact a Brooks Instrument representative to determine the best device for your needs.
The UL Listing Mark on a Thermal SLAMf, MF and Quantim IP65 series product is the manufacturer's representation that samples of that complete product have been tested by UL to nationally recognized Safety Standards and found to be free from a reasonably foreseeable risk of fire, electric shock and related hazards of a Division 2/ Zone 2 environment. It also acknowledges that the product was manufactured under UL's Follow-Up Services program.
The SLA5800, 5800 and Quantim IP40 series do not have a UL Listing Mark on the product. On closer examination, these products have the UL Recognized Component Mark. The UL Recognized Component Mark means that the component alone meets the requirements for a limited, specified use.
UL's Component Recognition Service covers the testing and evaluation of component products that are incomplete or restricted in performance capabilities. These components will later be used in complete end-products or systems.
Examples of what may have to be done to these recognized components to make the system complete:
- Housing: Since only rated to IP40, the product must either be installed in a dry safe location or the customer must provide other means of protection from dust, liquids, and impact.
- Wiring: The DB15 Connector is not a standard wiring method as defined by the National Electrical Code. Since these devices are not equipment with NPT electrical connection, cabling may have to be installed in a cable tray or protected in such a way that it would not be damaged
If you're unsure of the exact meaning of a given UL certification (Listing or Recognition), or other world certifications contact the local Brooks Instrument office.
- Change Quantim installation position to vertical up flow; this will eliminate trapped gas by allowing gas to rise to the outlet of the valve and keeping the valve full of process fluid.
- Lower push gas pressure used to drive the fluid; this will decrease the rate and amount of gas going into the solution.
- Work with your precursor supplier to determine the best push gas, based on low solubility.
- Remove pressure from precursor canister when the machine is idle, and place the canister under partial vacuum.
- Review precursor delivery temperature. If it is possible to warm the precursor slightly, this will reduce the gas solubility.
- If delivering water to Quantim, recommended push gas is helium as it has least amount of solubility.
- Review system valve sequencing to reduce rapid pressure changes across the Quantim controller.