Brooks Instrument manufacturers solutions for flow, pressure, and level measurement solutions

Overview

Electronic pressure controllers are flexible devices for manipulating the pressure of gas or liquid upstream or downstream of the device.  Brooks electronic pressure controllers utilize the core control technology present in our industry leading thermal mass flow controllers.

Brooks replaces the thermal mass flow sensor with an integral pressure sensor.  Industry leading control valve technology and software then control the pressure of a fluid based on an setpoint signal to the device.  Using a closed loop control, Brooks pressure controllers do not have the drop associated with traditional mechanical spring diaphragm pressure regulators.  Brooks pressure controllers are available with internal pressure sensors to control pressure in a range from torr to 4500 psig.

Brooks pressure controllers can be configured to use external pressure sensors for added flexibility.  When using an external pressure sensor the flow of the gas required to maintain pressure can be monitored.

Products

Digital Thermal Mass Pressure Controller, 1-1/8” Platform, Metal Seals

Brooks^® SLA7810/20 Series metal sealed digital pressure measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SLA7800 Series family of pressure controllers is the most accurate, repeatable, and responsive available. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.

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Digital Thermal Mass Pressure Controller, Elastomer Seals

Brooks^® SLA5800 elastomer Series of digital pressure measurement and control products utilizes Brooks superior mass flow designs and applies them to process pressure. The SLA5800 family of pressure controllers have options that accurately control upstream or downstream pressure. They are globally approved for use in a variety of service areas.

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Digital Thermal Mass Remote Transducer/Pressure Controller/Flow Meter, Elastomer Seals

The Brooks^® Model SLA5840 elastomer sealed digital pressure controller/flowmeter controls pressure while also measuring flow rate. It receives a remote pressure transducer signal, and, using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. This device can also be configured as a mass flow controller for calibration or test purposes.

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Digital Thermal Mass Remote Transducer/Pressure Controller/Flow Meter, 1-1/8” Platform, Metal Seals

The Brooks^® Model SLA7840 metal sealed digital pressure controller/flowmeter controls pressure while also measuring flow rate and, is designed to meet the latest 1-1/8” platform. It receives a remote pressure transducer signal, and, using adjustable integral PID control electronics and control valve, will maintain a desired set pressure.

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Thermal Mass Flow, Semiconductor

The Brooks Instrument Semiconductor line (5866E) of thermal mass flow and pressure instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. Availability of either analog or digital based technologies ensures the right fit for the application.

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Thermal Mass Pressure Controller, Metal Seal

Brooks^® Model 5866M metal seal pressure controllers accurately measure and control upstream or downstream pressure. The heart of the system is a solid state pressure transducer which produces an electrical output proportional to pressure. This signal is used to operate the integral control valve and to provide an output signal.

Specifications

					Max Pressure		Max Temp
Model	Type	Full Scale Capacity	Accuracy		bar	psig	C	F	Input/Output
SLA7810/20	Metal Seal, 1-1/8"	0-20 bar/ 290 psia	±0.5% FS		20	290	65	150	0-5 Vdc, DeviceNet™
SLA5810/20	Elastomer Seal	0-100 bar/1500 psia	0.5% FS		100	1500	65	150	0-5 Vdc, DeviceNet™ FOUNDATION fieldbus™
SLA5840	Elastomer Seal	3 sccm - 30 slpm	1% Rate		100	1500	65	150	0-5 Vdc, DeviceNet™
SLA7840	Metal Seal, 1-1/8"	3 sccm - 30 slpm	1% Rate		100	1500	65	150	0-5 Vdc, DeviceNet™
5866E	Elastomer Seal	0-300 bar/4500psi	0.5% FS		20	290	65	150
5866M	Metal Seal	0-300 bar/4500psi	0.5% FS		300	4500	65	150