Brooks Instrument manufacturers solutions for flow, pressure, and level measurement solutions

Overview

Brooks’ digital thermal mass flow controllers and meters, with over 150,000 installed around the world, offer faster response, better accuracy, and improved control over analog devices. The Smart Link Advantage (SLA) Series is Brooks’ premier smart digital thermal mass flow series. SLA mass flow controllers and mass flow meters link to advanced service tools and offer the advantage of digital protocols. The SLA Series provides many advanced features such as enhanced temperature stability, zero drift diagnostics, Coplanar Valve for improved turndown, and more.

Benefits of Brooks thermal mass flow meters and mass flow controllers include:

• Industry leading repeatability ensures a stable process even under changing conditions
• Self diagnostics and alarms eliminate downtime
• Multiple communication protocols allow easy integration into many control systems
• Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
• Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes

Products

Digital Thermal Mass Flow Meter/Controller, Elastomer Seals

Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas.

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Digital Thermal Mass Flow Meter/Controller, Elastomer Seals

The Brooks Model 5800S elastomer sealed digital flow controller expands the capability and functionality of Brooks’ Smart Mass Flow Products. Brooks’ proprietary Adaptive Valve Control makes these products virtually insensitive to process interference, ensuring unparalleled performance and fast control, even under varying process conditions. Models available with analog or digital I/O.

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The Brooks 4800 Series

The Brooks 4800 Series of mass flow meters and mass flow controllers is an excellent choice for measurement and control of many common gases. It offers a broad flow range, fast response time, compact size, and many other benefits for a variety of applications. The 4800 Series utilizes a Micro Electric Mechanical (MEMS) based thermal sensor that achieves extremely fast response times. It is ideally suited for OEMs. The optional Local Operator Interface provides a convenient user interface to view, control, and configure the 4800 Series devices.

Specifications

Digital Thermal Mass Flow

				Max Pressure		Max Temp
Model	Type	Full Scale Capacity	Accuracy	bar	psig	C	F	Input/Output
SLA5800 Series	Elastomer Seal Meter/Controller	3 sccm - 2500 slpm	1% Rate or 0.7% Rate 0.2% FS	300	4500	65	150	0-5 Vdc, 4-20 mA, RS-485 DeviceNet™ FOUNDATION fieldbus™
5800S Series	Mass Flow Meter/Controller	3 sccm - 2500 slpm	0.7% Rate & 0.2% FS	300	4500	65	150	0-5 Vdc, 4-20 mA, RS-232/485 Profibus FOUNDATION fieldbus™
4800 Series	Mass Flow Meter/Controller	50 sccm - 40 slpm	±1% FS or ±3% FS	10	150	50	122	0-5 Vdc, 4-20 mA, RS-232/485 Profibus
Optional Local Operator Interface available for the 4800 Series. Click here to download the 4800 Series Software.