Thermal Mass Flow Technology
Thermal Mass Flow (TMF) technology uses thermodynamic principles to drive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID flow controller in one compact, efficient instrument that can accurately control the flow of gases and liquids over a wide range of flow rates.A pressure sensor can be mounted in place of a flow sensor for applications requiring pressure control. Thermal mass flow products exhibit high repeatability and accuracy, providing an effective way to ensure a reliable and stable process.
Brooks portfolio of digital and analog thermal mass flow controllers lead the industry in performance – many of our devices have been in operation for over 20 years. Our latest thermal mass flow devices provide significant advantages in response time, accuracy, repeatability, turndown, and self-diagnostics.
Our thermal mass flow products also have an array of certifications and approvals for ingress protection and use in hazardous areas.
More Info at a Glance:
- Thermal Technology Applications
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You can turn to Brooks for virtually every need – including:
- FOUNDATION Fieldbus communications optionv(an industry first!)
- Ultra high purity devices for the vacuum thin film and semiconductor industry
- IP66 MFCs for wash down applications
- Downport MFCs
- Pressure and temperature insensitive MFCs
- Many, many more!
- Products with Thermal Mass Flow Technology
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Brooks offers an array of products that implement Thermal Mass Flow technology. For more information, visit:
