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HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

Brooks Instrument Legacy Products

Mass Flow Controllers

Brooks 5850S Mass Flow Controller

5800S Series

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual

View Replacement Product

Brooks SLA5850 RevA mass flow meter

SLA5800 Series Revision A

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual
Download Data Sheet

View Replacement Product

Variable Area Flow Meters (Rotameters)

Brooks 1350E flow meter with valve

Sho-Rate Series 1350E/1355E

Brooks Full-View Glass Tube Flow Meter

Full-View® 1100 Series

Brooks MT3602 variable area flow meter

MT3600 Series

Brooks MT3809E variable area flow meter

MT3809E Series