The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the delivery of ultra-high purity water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.
Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wide control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in the non-super-heated vapor stage, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.
It also provides user-friendly data logging and diagnostic features via an independent service port and intuitive graphic user interface.