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Welded DLI Vaporizer

Flexible, high-purity, indirect vaporization-on-demand.
Models DLIWV / DLIWS / DLIWM / DLIWL

The Welded DLI Series vaporizer from Brooks Instrument utilizes a fully welded construction of 316L stainless steel for highly durable devices with an all-stainless steel vapor flow path. There are four different models that vary in length and heater power capacity to meet specific flow requirements.

Our advanced direct liquid injection vaporizer solutions incorporate unique atomization and heat exchanger technologies to create and deliver a chemically pure vapor, free of decomposition byproducts or liquid carryover. The Brooks DLI vaporizer is close to being a true "vapor-on-demand" system because increasing, decreasing or stopping the incompressible liquid flow quickly results in the desired change in vapor flow.

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

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Features

  • High flow, high power 3,5,6,11” heat exchangers
  • Heaters: 200-5000 watts
  • Great for high flow, high vapor pressure liquids (MTS, TiCI4, solvents, etc.)
  • High purity and repeatability
  • Fully welded 316L stainless steel construction with optional  Kalrez® or metal seals
  • Extremely fast response time compared to other vaporizer technologies

Benefits

  • Hot gas accomplishes complete vaporization
  • Eliminates thermal decomposition
  • Eliminates liquid carry-over mass in = mass out means no clogging or routine maintenance
  • Chemically pure vapor
  • Multiple liquid inlets are capable of vaporizing liquids with different vapor pressures

Applications

  • Water vaporization for fuel cell stack humidification
  • Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
  • Depositing thin films for enhanced thermal, optical or hardness characteristics such as diamond-like carbon coating and glass coating
  • Vaporizing monomers for vacuum polymer film disposition
  • Generating calibration vapor
  • Vaporizing liquid hydrocarbons
  • Semiconductor thin-films
Product Type
Vaporizer
Differentiator

Flexible, high purity, indirect vaporization-on-demand for most liquid precursors

Performance
Vaporization Method
Direct liquid injection with atomization
Fluid Type
Water, hydrocarbons, polymers, metal organics and metal halides
Max Vapor Capacity
Accuracy

Dependent on liquid flow controller

Response Time

Dependent on liquid flow controller

Ratings
Heater Power
200 - 5000 W
Max Pressure

875 psig (standard)

1450 psig (w/ radiography option)

Max Temperature

Viton seal: 200°C

Kalrez seal: 300°C

Leak Integrity
1 x 10-9 cc/sec (helium)
Differential Pressure Range
(1.2 x Outlet Pressure) + 10 psi
Mechanical
Wetted Materials

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

Seal Material

Viton® fluoroelastomer or 

Kalrez® perfluoroelastomer

Fittings

Carrier Gas Inlet: 1/4” or 1/2” tube compression or male VCR

Liquid Inlet: 1/8” or 1/4” tube compression or male VCR

Vapor Outlet: 1/4” or 1/2” male VCR or tube stub

Connection Types
Universal female panel jack (for thermocouples)
Price
$$$$
DLIWV DLIWS DLIWM DLIWL
Heat Exchanger Length

3"

 

5"

 

8"

 

11"

 

Heater Power 200 - 1000 Watts 200 - 1000 Watts 400 - 2000 Watts 800 - 5000 Watts
Fluid Type DI Water, metal halides & metal organics DI Water, metal halides, & metal organics

DI Water, metal halides & metal organics

DI Water, metal halides & metal organics
Max Pressure

875 psig (standard)

1450 psig (w/ radiography option)

875 psig (standard)

1450 psig (w/ radiography option)

875 psig (standard)

1450 psig (w/ radiography option)

875 psig (standard)

1450 psig (w/ radiography option)

Max Temperature

Viton seals: 200° C

Kalrez seals: 300° C

Viton seals: 200° C

Kalrez seals: 300° C

Viton seals: 200° C

Kalrez seals: 300° C

Viton seals: 200° C

Kalrez seals: 300° C
FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
0254 Series
Controls and powers up to 4 devices