Skip links

HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

High & Ultra-High Purity Gas Mass Flow Controllers & Meters

Challenge: Maximize tool uptime and productivity

The reliability and versatile performance of mass flow controllers is fundamental to many semiconductor process tools. Process tools only earn returns on their multi-million dollar investment when up and running; if an MFC drifts beyond crucial set points, or new fabrication processes require multiple gases (and multiple MFCs), downtime for changeovers and/or recalibration or repair escalates.

Solution: Advanced MultiFlo®-capable GF Series MFCs

Accurate, repeatable delivery of process gases with ultra-high levels of purity – that’s the performance the GF Series of metal seal mass flow controllers and meters provides. The GF Series has been marathon tested to seven times semiconductor industry standards for reliability. An all-metal flow path and corrosion-resistant Hastelloy® sensor ensures the highest level of gas purity and moisture-free flow. And the unique programmable MultiFlo® technology enables one MFC to support thousand of gas types and range combinations.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

PRODUCTS

9861 Series
9861 Series
GF100 Series
GF100 Series
GF125 Series
GF125 Series
GF135 Series
GF135 Series
Product Type Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller
Differentiator

Highest Flow Accuracy

Highest Operating Temperature

Digital Communication

High Purity/Ultra-High Purity

Standard GF Series

High Flow GF Series

Ultra-High Purity

Ultra-Fast Response Time

Pressure Transient Insensitivity

Real-Time Flow Error Detection

Advanced Diagnostics

Seal Material Metal Metal

Metal

Metal

Level of Purity / Surface Finish 4 μ inch Ra 4 - 10µ inch Ra 4 - 5µ inch Ra 4µ inch Ra
Flow Range (Full Scale Capacity) 10 slm (N2 equivalent)

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

3 sccm - 300 slm

3 sccm - 5 slm (N2 Eq.)

Accuracy

1% of SP@ 35 - 100% FS

0.35% of FS @ <35% FS

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F. S. 2-35%

±1% S.P. 10-100% F.S.

±1% S.P. plus ±0.04% F.S. 2-10% F.S.

Max Pressure

1,050 kPa (150 psi)

Standard GF Series: 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Standard GF Series: 100 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

100 psia max

Max Temperature 150oC 50oC 50oC

50oC

Analog Communication

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

Digital Communication

RS485 L-Protocol (via dual RJ11 ports)

DeviceNet™

RS485 L-Protocol

DeviceNet™

RS485 L-Protocol

DeviceNet™

RS485