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122 Series Mechanical Pressure Gauges

Reliable, efficient local pressure monitoring for high-purity applications.
Models S122 / C122 / F122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, they feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally.

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Features

  • Stainless steel movement providing precision performance
  • 316L stainless steel wetted parts
  • Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines
  • Variety of models and pressure ranges to support specific design needs

Benefits

  • Durable and efficient way to monitor pressure locally

Applications

  • Gas delivery systems and tools used for semiconductor processing, including:
    • Bulk gas
    • Gas cabinets
    • Gas distribution
Product Type
Mechanical Pressure Gauges
Differentiator

High-Purity

Performance
Pressure Range

- 30" - 4000 psi

Accuracy
1% Full Scale
Burst Pressure
400%
Proof Pressure
110%
Ratings
Safety Relief
Unrestricted rear blow-out plug
Helium Leak Check
4 x 10-9 Inboard Std. cc/sec
Cleanliness
Cleaned for oxygen service to ANSI B40.1 level IV specifications
Mechanical
Housing
300 Series Stainless Steel, electropolished
Bezel & Lens Material
One-piece polycarbonate, screw-on
Socket Material
316L Stainless Steel
Movement

300 Series Stainless Steel

Bourdon Tube
316L Stainless Steel
Process Connections

Face-seal male, Face-seal swivel male,

Face-seal swivel female and 1/4" NPT male

Dial
White with Black markings, "Use no Oil" is red
Surface Finish

Not Applicable

S122 C122 F122
Differentiator Socket Orientation Socket Orientation Socket Orientation
Pressure Range Vacuum - 4,000 psi Vacuum - 4,000 psi Vacuum - 4,000 psi
Accuracy 1% FS 1% FS 1% FS
Socket Orientation Stem Mounted

Center Back Mounted

Center Back Mounted with SS Front Flange

FilenameFile TypeDocuments By Language
Data Sheet pdf English