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The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®
Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Questions?

Contact Sales

Want to see it in action?

Request Demo Device

Performance Perfected for Semiconductor Processes

  • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery

Features

  • Long-term zero stability of <±0.15% full scale per year
  • Settling times: 300 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes

Benefits

  • Exceptional performance
    • Rapid reaction times improve application efficiency
  • Flexible topology
    • Virtually limitless network topology possible
  • Simple and robust
    • Configuration, diagnostics, and maintenance
  • Affordability
    • Standard Ethernet port

Applications

  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems
Product Type

Mass Flow Controller

Differentiator

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

Performance
Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

Accuracy

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

Repeatability
< ±0.15% S.P.
Response Time

Normally Closed Valve: 300 ms - < 1 sec

SDS Gas Delivery: < 3 sec

Response Time

Normally Open Valve: <1.5 sec (specific models)

Pressure Transient Insensitivity

Specific models

Multi-Gas & Range Configurability
MultiFlo™ Standard (most models)
Control Range

Standard GF Series:  2-100%

High Flow GF Series: 5-100%

Number of Bins

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

Valve Shut Down

Standard GF Series: < 0.15% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

Zero Stability

< ±0.15% F.S. per year

Flow Temperature Coefficient

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

Mechanical
Seal Material
Metal
Level of Purity / Surface Finish

5 - 10µ inch Ra

Wetted Materials

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

Valve Options

Normally Closed

Normally Open (specific models only)

Meter (no valve)

Ratings
Max Temperature
50oC
Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

SDS Models 10 Torr- 30 psid typical

*Typical pressure drops. Contact Brooks Technical Support for more information.

Max Pressure

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity
1x10-10 atm cc/sec He
Diagnostics & Display
Diagnostic Capability
Available

Status Lights

Run

Error

Power

Network Status

Alarms

Control Valve Output

Network Interruption

Temperature High/Low

Pressure High/Low

Power Surge/Sag

Diagnostic / Service Port

Micro USB

Display

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

Electrical
Digital Communication

EtherCAT®

Electrical Connection

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

Power Supply / Consumption

24 Vdc, 7 Watts

(Under typical operating conditions)

GF100

GF101

 

GF120

 

GF120XSD

 

GF120XSL

 

GF121

 

GF125

 

GF126

 

Differentiator

High Purity

High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate

Flow Range (Full Scale Capacity) 3 sccm - 55 slm

55 slm - 300 slm

3 sccm - 55 slm >25 sccm - 1 slm 4 - 25 sccm

55 slm - 300 slm

3 sccm - 55 slm

55 slm - 300 slm

Surface Finish 10µ inch Ra 10µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

Accuracy

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

Repeatability < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
Response Time

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms - <700ms

 

Normally Closed

<1 sec

 

Response Time

Normally Open

<1.5 sec

Normally Open

Normally Open

<1.5 sec

Normally Open

Normally Open

Normally Open

Normally Open

<1.5 sec

Normally Open

Multi-Gas & Range Configurability MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
Pressure Transient Insensitivity

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure

Diagnostic Capability

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Digital Communication

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

FilenameFile TypeDocuments By Language
Flyer pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF125 -WX - GX - STEP

Model Series
  Fitting   Connector
 GF1xx   CX - 1-1/8” body width, 92 mm C Seal
  E0 - EtherCAT® via twin RJ45, Power via 5-pin M8 connector
    VX - 1-1/2” body width, 124mm 1/4” VCR male
    WX - 1-1/8” body width, 92mm W Seal

FilenameFile Type
GF125-CX-E0 DXF
GF125-CX-E0 IGS
GF125-CX-E0 STEP
GF125-VX-E0 DXF
GF125-VX-E0 IGS
GF125-VX-E0 STEP
GF125-WX-E0 DXF
GF125-WX-E0 IGS
GF125-WX-E0 STEP
0254 Series
Controls and powers up to 4 devices
MultiFlo™ Configurator
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.