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5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.
Models 5850EM / 5851EM

5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Features

  • Long-term zero stability of <0.2% full scale per year
  • <3 seconds settling time to command changes with negligible overshoot/undershoot
  • Wide flow range – from 3 sccm up to 30,000 slpm
  • High pressure rating - up to 1,500 psi
  • Optional enhanced process internal finish - 5µ inch Ra avg
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • TTL compatible "valve off" and purge function

Benefits

  • All-metal flow path enhances gas purity and reduces leaks
  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced with analog only input/outputs

Applications

  • Fiber Optic
  • LED / MOCVD
  • Semiconductor
  • Solar
Product Type
Mass Flow Controller
Differentiator

Large installed base with proven long term performance

Performance
Flow Range (Full Scale Capacity)
.06 sccm - 30,000 sccm
Accuracy

1% F.S. incl. linearity

1.5% F.S. incl. linearity >20 slpm

Repeatability

0.2% of rate

Linearity

±0.5% F.S. (included in accuracy)

Response Time

Normally Closed Valve: <3 sec

Optional: 600 msec

Multi-Gas & Range Configurability

Pressure Transient Insensitivity
Control Range

2-3% - 100%

Number of Bins

N/A

Valve Shut Down

N/A

Zero Stability
< ±0.5% F.S. per year
Mechanical
Seal Material
Metal
Level of Purity / Surface Finish

316L VAR, 316L, and high alloy ferritic stainless steel

Wetted Materials

Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®

Valve Options

Normally Closed, Normally Open

Meter (no valve)

Ratings
Max Temperature
65oC
Differential Pressure Range

5 - 50 psi (gas and range dependent)

Max Pressure

1500 psi

Leak Integrity
1x10-10 atm cc/sec He
Diagnostics & Display
Diagnostic Capability

Status Lights
MFC Health, Network Status
Alarms

Control Valve Output, Network Interruption

Diagnostic / Service Port

N/A

 

Electrical
Analog Communication

4-20 mA

0-5 Vdc

Digital Communication

Electrical Connection

15 Pin D Connector (DA-15P)

Power Supply / Consumption

Normally Closed valve: 3.25 watts

Normally Open valve: 10.5 watts

Compliance
EMC

(89/336/EEC) per 61326

Environmental Compliance

N/A

5850EM

 

5851EM
Differentiator
Flow Range (Full Scale Capacity)

.06 sccm - 30,000 sccm

10 - 100 slpm Nitrogen
Surface Finish

5 Ra internal finish (optional)

Electropolished wetted surfaces (optional)

Electropolished wetted surfaces (optional)

Enhanced process (5 Ra avg.) internal surface finish(optional)

High purity VAR 316L Stainless Steel

Accuracy

1% F.S. including linearity

1.5% F.S. including linearity (>20 slpm)

1 % F.S. including linearity

Repeatability

0.25% Rate

0.2% Rate

Response Time

Normally Closed Valve

<3 sec

Normally Closed Valve

<3 sec

Multi-Gas & Range Configurability

N/A

N/A

Pressure Transient Insensitivity

.008% per psi Nitrogen

0.03% per psi up to 150 psig

Diagnostic Capability

MFC Health, Network Status

MFC Health, Network Status

Analog Communication

4-20 mA

0-5 Vdc

4-20 mA

0-5 Vdc

Digital Communication

N/A

 

Profibus

RS485 S-Protocol

RS485 L-Protocol

DeviceNet™

 

FilenameFile TypeDocuments By Language
Data Sheet pdf English Japanese
Installation & Operation Manual - 5850EM pdf English
Installation & Operation Manual - 5851EM pdf English
0254 Series
Controls and powers up to 4 devices