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SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Precision mass flow control. Hardened for the harshest environments.
Models SLAMf50 / SLAMf60 / SLAMf51 / SLAMf61 / SLAMf53 / SLAMf63

Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven SLA5800 family of meters and controllers. A specially engineered NEMA4X/IP66 enclosure protects our advanced digital electronics and ensures stable, accurate measurement and control of your process-critical gas and liquid mass flows.

Questions?

Talk to one of our application engineering experts:

Call: 1-888-554-3569

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Features

  • NEMA4X / IP66 rated hardened enclosure
  • Wide range of flow ratings - from 0.003 up to 2500 lpm
  • Suitable for a broad range of temperature and pressure conditions
  • Industry-leading thermal flow measurement sensor technology delivers excellent accuracy
  • Programmable multi-gas/multi-range capabilities
  • Advanced self-test routines and an independent diagnostic service port lets users troubleshoot or change flow conditions without removing the MFC from service
  • Broad array of communication options including DeviceNet®, Profibus® and RS-485 plus analog interfaces

Benefits

  • Hardened device housing ensures process accuracy and control in harsh conditions
  • Proprietary thermal sensing technology delivers superior signal to noise ratio at low set points
  • Long-term sensor stability reduces maintenance and periodic recalibration requirements
  • Choose one device, program up to six different gas calibrations
  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks
  • Excellent accuracy backed by superior metrology systems and calibration based on global standards
  • Multi-protocol communication interface simplifies integration into existing systems

Applications

  • Chemical and petrochemical pilot plants
  • Life sciences bioreactors
  • Blanketing in food processing


Product Type
Mass Flow Controller
Differentiator

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Performance
Flow Range (Full Scale Capacity)
.003 - 2500 lpm
Accuracy

Up to 100 lpm: 0.90% of SP (20-100% FS)

0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm)

100 - 2500 lpm: 0.90% of SP (20-100% FS)

100 - 1100 lpm: 0.18% of FS (2-20% FS)

1100 - 2500 lpm: 1.0% of FS

Repeatability

0.20% SP

Linearity

Included in Accuracy

Response Time

<1 second up to 100 lpm

<3 seconds up to 2500 lpm

Multi-Gas & Range Configurability

Standard

Max Pressure

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

Control Range

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

Zero Stability

< 0.2% F.S. per year

Flow Temperature Coefficient

Zero: <0.05% of F.S. per °C

Span: < 0.1% of S.P. per °C

Pressure Coefficient

±0.03% per psi (0-200 psi N2)

Attitude Sensitivity

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

Ratings
Max Temperature
65oC
Differential Pressure Range

Controllers

Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max

50-100 lpm: 10 psi/0.69 bar min -  50 psi/3.45 bar max

500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max

1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max

2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max

 

Leak Integrity
1x10-9 atm cc/sec He
Mechanical

Seal Material
Elastomer Seal
Wetted Materials

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

Valve Options

Normally Closed

Normally Open

Meter (no valve)

Diagnostics

 

Diagnostic Capability
Available

Status Lights

MFC Health, Network Status

Alarms

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

Diagnostic / Service Port

RS485 via 2.5mm jack

Electrical

Analog Communication
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



Digital Communication
DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485





Electrical Connection

DeviceNet™: 1 x M12 with threaded coupling nut (B)

Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

Power Supply / Consumption

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts

Compliance
Certifications/Approvals

CE: EMC Directive 2004/108/EC

UL (Recognized): Class I, Div 2, Group A, B, C, D

ATEX: II 3 G Ex nA IIC T4 Gc

ATEX: II 3 D Ex ic IIIC T85°C Db

IECEx: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 D Ex ic IIIC T85°C Db

Environmental Compliance

RoHS

Size
Large
SLAMf50 SLAMf60 SLAMf51 SLAMf61 SLAMf53 SLAMf63
Product Type Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter Mass Flow Controller Mass Flow Meter
Differentiator

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Flow Range (Full Scale Capacity) 0.003 - 50 lpm 0.003 - 50 lpm 15 - 100 lpm 15 - 100 lpm 100 - 2500 lpm 100 - 2500 lpm
Max Pressure 1500 psi / 100 bar 1500 psi / 100 bar 1500 psi / 100 bar 1500 psi / 100 bar 1000 psi / 70 bar 1000 psi / 70 bar
Accuracy

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

0.9% S.P. (20-100% F.S.)

0.18% F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

100 - 2500 lpm: 0.9% S.P. (20-100% F.S.)

100 - 1100 lpm: 0.18% of F.S. (2-20% F.S.)

1100 - 2500 lpm: 1.0% of F.S.

Repeatability 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P.
Response Time <1 second <1 second <1 second <1 second <3 seconds <3 seconds
Multi-Gas & Range Configurability Standard Standard Standard Standard Standard Standard
Diagnostic Capability

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Analog Communication

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

DeviceNet™

Profibus®

FOUNDATIONTM Fieldbus

RS-485

FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual - Revision B pdf English Korean
Installation & Operation Manual - Revision A pdf English
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
RS485 Supplemental Manual - SLA5800, SLAMf pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: SLAMf60 - S - B1 - 0 - Y - RevB

Meter Series
Digital Communications I/O
Mechanical Connection
(Body size 0 & 1 only)
Valve Type
Analog Communications I/O
Revision Level
 SLAMf5x  S - RS485 (select applicable analog I/O)
 B1 - 1/4” tube compression w/Filter
 0 - None (Sensor only)
 Y - 4-20 mA / 0-5 V M20x1.5 Conduit
 RevB
 SLAMf6x
 
     

 *See data sheet for more options

 

FilenameFile Type
SLAMf60-S-B1-0-Y-RevB STEP
0254 Series
Controls and powers up to 4 devices
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of SLA and SLAMf Enhanced Series MFCs and Pressure Controllers.
Brooks LabVIEW™ DLL

Enables users to set-up communication with Brooks® digital MFCs and/or secondary electronics without requiring a licensed LabVIEW program.

Smart DDE

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.