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5850EMH Series High Temperature Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high temperature applications.
Models 5850EMH / 5851EMH
Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.


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  • High leak integrity (less than 10-11 Pa.m3/s (10-10 He)
  • Wide flow range (0.003 – 100 slpm)
  • High-purity VAR 316L Stainless Steel
  • Particulate-free
  • Helium leak check ports
  • Normally closed valve (normally open valve optional)
  • Electrically-activated valve override
  • Low command flow cutoff
  • TTL compatible “valve off” function


  • Stable, proven product platform
  • High flow capability up to 100 lpm (N2 equivalent)
  • All-metal flow path enhances gas purity and reduces leaks
  • Easily installed and serviced with analog only input/outputs


  • Optical Fiber Manufacturing – MCVD, OVD, AVD
  • Water Vapor Flow Control 
Product Type
Mass Flow Controller

Highest Flow Range

Proven, reliable technology

Flow Range (Full Scale Capacity)
100 slm (N2 equivalent)

1% of FS

<±0.25% SP

Included in accuracy.

Response Time

<3 sec to within 2% of SP (per SEMI E17-91)

Zero Stability
Seal Material
Level of Purity / Surface Finish

Wetted Materials

316L, 316L VAR, & high alloy ferric SS

Valve Options

Normally Open

Normally Closed

Max Temperature
Differential Pressure Range

50 - 350 kPa (7 - 50 psid)

Max Pressure

1 MPa (145 psi)

Leak Integrity
1x10-10 atm cc/sec He (1x10-11 Pa m3 /sec)

Analog Communication

0-5 Vdc

Digital Communication
Electrical Connection

15-Pin "D" connector

Power Supply / Consumption

±15 Vdc @ 350 mA (max)

5850EMH 5851EMH
Flow Range (Full Scale Capacity) 3 sccm - 30 slm (N2 equivalent) 10 - 100 slm (N2 equivalent)
Surface Finish


±1% FS

±1% FS

Repeatability < ±0.25% of SP < ±0.25% SP
Response Time

 3 sec to within 2% of SP (per SEMI E17-91)


 3 sec to within 2% of SP (per SEMI E17-91)


Diagnostic Capability
Analog Communication

0-5 Vdc

0-5 Vdc

Digital Communication



FilenameFile TypeDocuments By Language
Data Sheet pdf English
Installation & Operation Manual pdf English
Quick Start Guide pdf English