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Spray Coatings
Spray coating is being considered as an alternative technique for forming thin films and for applying liquid dopant to wafers. The control of liquid to the spray nozzle determines the film thickness and the gas flow to the spray nozzle determines droplet size and distribution.Brooks’ Quantim Coriolis mass flow controllers are ideally suited for active control of liquid flow to a spray nozzle. This eliminates open loop control normally found on pressure or pump only systems and ensures consistent coating over extended production runs. The built-in density measurement can be used to confirm the phosphorous concentration of a liquid spray on dopant or the solids concentration in photovoltaic liquid ink.
Other Application Notes
- Basic Flow Control
- Catalyst Research
- Heat Treating, Cutting/Welding, and other Thermal Processes
- Vacuum Processes
- Bioreactors
- Precision Coatings
- Chemical Injection/Dosing Systems
- Process Analyzer Sample Flow
- Rotating Equipment
- Fuel Cell Test Stand
- Device Testing and Metrology
- Level Measurement
- Physical Vapor Deposition
- Chemical Vapor Deposition, including MOCVD
- Transparent Conducting Oxides
- Polysilicon and Crystal Pulling
- Spray Coatings
