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Transparent Conducting Oxides
One of the most important films in a thin film solar cell is the transparent conducting oxide. Metal organic precursors are used to deliver these atoms to the substrate. Bubblers have been used to vaporize these liquids, with the disadvantages of minimal flexibility and relatively low mass delivery.Brooks offers powerful liquid vaporization solutions that permit flexible operation and repeatable delivery of liquid precursors. These systems feature Brooks gas and liquid flow controllers plus unique direct liquid injection vaporization modules that ensure complete vaporization, low transit times, and quick startup and shutdown. The vaporizer solutions are engineered using a modular design to support a wide range of process fluids and operating conditions.
Other Application Notes
- Basic Flow Control
- Catalyst Research
- Heat Treating, Cutting/Welding, and other Thermal Processes
- Vacuum Processes
- Bioreactors
- Precision Coatings
- Chemical Injection/Dosing Systems
- Process Analyzer Sample Flow
- Rotating Equipment
- Fuel Cell Test Stand
- Device Testing and Metrology
- Level Measurement
- Physical Vapor Deposition
- Chemical Vapor Deposition, including MOCVD
- Transparent Conducting Oxides
- Polysilicon and Crystal Pulling
- Spray Coatings
