Flow Meter and Flow Controller Solutions by Brooks Instrument

Overview

For those that do not require the super high performance and accuracy of a Brooks digital mass flow controller, Brooks continues to offer reliable analog mass flow controllers and mass flow meters. Brooks’ analog gas mass flow meters and mass flow controllers are designed to meet the rigorous demands of our customers’ established and newly developing process applications. They have proven to be very stable over time. These devices continue to add to their expansive installed base due to their good response, accuracy, and simple integration.

• Years of field-proven reliability
• Analog I/O allows for quick and easy system integration
• Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
• Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
• Globally approved for a variety of service areas

Products

Analog Thermal Mass Flow Controller, UHP

The Brooks Model 5964 Ultra-High Purity (UHP) metal sealed mass flow controller offers state-of-the-art performance in gas flow measurement and control. It combines the outstanding leak integrity of metal seals, ultra-clean internal surface finish (5 Ra avg) for particulate-free delivery and enhanced response for rapid process applications.

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Thermal Mass Flow, Semiconductor

The Brooks Instrument Semiconductor line of thermal mass flow and pressure instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. Availability of either analog or digital based technologies ensures the right fit for the application. Model 5965 is thermal, analog, gas.

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Thermal Mass Flow Controller, 3 - 30,000 sccm, Metal Seals

The Brooks Model 5850EM metal sealed mass flow controller accurately measures and controls gas flows in ultraclean environments of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Thermal Mass Flow Controller, 10 - 100 slpm, Metal Seals

The Brooks Model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 10 - 100 slmp (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals

The Brooks Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals

The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals

The Brooks Model 5860E elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals

The Brooks Model 5861E elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5863E elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals

The Brooks Model 5850i mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals

The Brooks Model 5851i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5853i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals

The Brooks Model 5860i elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals

The Brooks Model 5861i elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals

The Brooks Model 5863i elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

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The Brooks^® 4800 Series

The Brooks 4800 Series of mass flow meters and controllers is an excellent choice for measurement and control of many common gases. It offers a broad flow range, fast response time, compact size, and many other benefits for a variety of applications. The 4800 Series utilizes a Micro Electric Mechanical (MEMS) based thermal sensor that achieves extremely fast response times. It is ideally suited for OEMs. The optional Local Operator Interface provides a convenient user interface to view, control, and configure the 4800 Series devices.

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Electronic Flow Meter MassRateTM 5700

The Brooks MassRate 5700 is a gas flow meter specially designed to satisfy the needs of purge gas, process analysis and analytical flow measurement applications. The MassRate 5700 utilizes a proven thermal mass flow sensor which provides excellent repeatability, wide turndown and an electrical output signal. It has a rugged all stainless steel construction and no moving parts providing superior corrosion resistance and long- term reliability. The MassRate 5700 is an economical meter with an electrical output signal making it ideal for replacing turbine meters, variable area meters and other volumetric devices.

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Brooks Model 5850TR - TR-series MFC

The Brooks model 5850TR flow controller accurately measures and controls gas flows. It is an economical solution to various metering and control processes, or for installation in (OEM) analytical and environmental equipment. It provides simple and direct mass flow measurement and stable control.

Specifications

Analog Thermal Mass Flow

				Max Pressure		Max Temp
Model	Type	Full Scale Capacity	Accuracy	bar	psig	C	F	Input/Output
5964	UHP Metal Seal Controller	3 sccm - 50 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5965	UHP Metal Seal Controller	0 - 100 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5850EM	Metal Seal Controller	3 sccm - 30 slpm	1% Rate	100	1500	65	150	0-5 Vdc
5851EM	Metal Seal Controller	10 - 100	1% Rate	100	1500	65	150	0-5 Vdc
5850E	Elastomer Seal Meter/Controller	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc
5851E	Elastomer Seal Meter/Controller	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc
5853E	Elastomer Seal Meter/Controller	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc
5860E	Elastomer Seal Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc
5861E	Elastomer Seal Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc
5863E	Elastomer Seal Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc
5850i	Elastomer Seal Meter/Controller	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5851i	Elastomer Seal Meter/Controller	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5853i	Elastomer Seal Meter/Controller	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5860i	Elastomer Seal Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5861i	Elastomer Seal Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
5863i	Elastomer Seal Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA
4800 Series	Mass Flow Meter/Controller	50 sccm - 40 slpm	±1% FS & ±3% FS	10	150	50	122	0-5 Vdc 4-20 mA
Optional Local Operator Interface available for the 4800 Series. Click here to download the 4800 Series Software.
5700	Electronic Flow Meter		5% FS	150		65	150	0-5 Vdc
5850TR	Elastomer Seal Meter/Controller		±1% FS	100	1500	65	150	0-5 Vdc 4-20 mA