China
Shanghai, R.O.C.
Services- Calibration, recondition and reconfiguration of Brooks Instrument TMF products. TMF products serviced:
- Analog: 5850/5860E & I Series including 51/61, 53/63 and 5864
- Smart Series: 5850/5860S, including 51/61, 53/63 and 5864
- Smart II Delta Series
- SLA 7950D, SLA 7950S
- Preventive Maintenance Programs
- As Found/As Left Calibration Reports
- Technical Support, On-site start up
Capabilities Overview
- Class 100 clean room
- Flow rates up to 30 SLPM N2 equivalent
- Up to 350 PSIG inlet pressure
- Direct gas calibration: N2
Phone: 86-21-3895 4788
Please call the China Support Center to Request a RMA