Brooks Instrument manufacturers solutions for flow, pressure, and level measurement solutions

Polysilicon and Crystal Pulling

Brooks products play a key role in polysilicon production. Our glass and metal tube variable area meters are widely used for measuring flow of utility fluids such as low pressure nitrogen, nitrogen purge and sweep flows, make-up hydrogen, heat transfer fluids, and pump seal gases. They can also be fitted with flow alarms for added safety. Our magnetic level gauges can be used throughout the polysilicon plant in process liquid storage and process liquid condensate service, steam condensate, brine, refrigerant, and other level applications. Brooks’ polysilicon products have been designed to assure a very long product lifespan and many offer alarms and transmitters to enhance application flexibility.

The formation of a single crystal of silicon requires the control of argon gas to purge impurities from the crystal pulling system as the crystal is grown. Brooks thermal mass flow controllers and variable area products have the capacity to control the large flow of argon used in this critical process.

Other Application Notes

• Basic Flow Control
• Catalyst Research
• Heat Treating, Cutting/Welding, and other Thermal Processes
• Vacuum Processes
• Bioreactors
• Precision Coatings
• Chemical Injection/Dosing Systems
• Process Analyzer Sample Flow
• Rotating Equipment
• Fuel Cell Test Stand
• Device Testing and Metrology
• Level Measurement
• Physical Vapor Deposition
• Chemical Vapor Deposition, including MOCVD
• Transparent Conducting Oxides
• Polysilicon and Crystal Pulling
• Spray Coatings