Here at Brooks, we’re gearing up for a big trip — to Shanghai! For the first time, we’ll be exhibiting at SEMICON China from March 19-21. We’re sharing booth 5505 with our valued partner SCH Electronics, and look forward to showcasing our high-performance digital solutions for flow, vacuum and pressure measurement.
But the big news is that Brooks will be launching the revolutionary GF135 pressure transient insensitive mass flow controller (MFC) at SEMICON China. The GF135 improves yield and uptime for semiconductor manufacturers with real-time integral rate-of-decay measurement and advanced diagnostic capabilities. These diagnostics enable users to verify accuracy, check valve leak-by and monitor sensor drift without stopping production. The MFC provides market-leading actual process gas accuracy and ultra-fast flow settling time for reduced process cycle time. Read more…
Intersolar North America is just around the corner, and Brooks will be setting up shop at Booth 5648 (July 10-12, San Francisco). We’re introducing two new products that will have a big impact on the solar and semiconductor industries.
First up is the XacTorr CMX0 capacitance manometer, which is part of the Brooks XacTorr CMX family of capacitance manometers. These instruments provide solar and semiconductor manufacturers with highly stable and repeatable measurements for pressure sensitive processes. The XacTorr CMX0 offers users:
• An unheated option with full-scale ranges from 1,000 Torr to 100 mTorr
• Accuracy of 0.25% of reading
• Drop-in replacement
• Unique diagnostic features for preventative maintenance such as tracking remaining zero adjustment range to allow scheduled maintenance, reducing unplanned interruptions.
We’ll also be unveiling communication upgrades to the GF40/80, our highly modular, user-programmable mass flow controller designed for solar and thin-film processes.
The GF40/80 is now equipped with EtherCAT, a highly flexible network protocol that has been adopted by leading-edge manufacturers in the solar and microelectronics industries. A unique principle called “processing on the fly” gives EtherCAT some unique advantages. Because EtherCAT messages are passed before being processed in each node, EtherCAT operates at a high speed and efficiency. The process also creates flexibility in topology and incredible synchronization making it easier to network flow control and other devices for advanced process control and diagnostic capabilities.
We hope you’ll stop by and say hello. And, as a thank you for previewing a demo of our new products, you’ll get a free 4GB USB drive in the shape of a mass flow controller, of course. You can also check out our latest news about Intersolar North America here.
Designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability, and flexibility. Highlights of the GF100 series industry leading features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and range programmability, optional pressure transient insensitivity (PTI), local display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and valve seat.
GF120XSD is an extension to Brooks GF100 Series thermal mass flow controller family (MFC). Designed for extreme low pressure operation, the GF120XSD has been optimized for the precise delivery of high value, low pressure specialty gases. Read more…
We’re proud to announce that Brooks is the recipient of another award this year. The 2011 Innovation Award from Flow Control magazine joins our Golden Gas Award and Control Readers’ Choice Awards from earlier this year. Read more…