If you can answer yes to any of these questions, your process could benefit from using a remote valve configuration on your controller:
Many of our customers need to turn liquids into vapor to apply a treatment to an item, or to use vapor as an ingredient to create something. Some specific examples include MOCVD, Atomic Layer Deposition, or Vacuum Polymer Film Deposition. Generating vapor reliably is very difficult, and many users of vapor cobble their own vapor generation system together and assume everything is working as expected. Most of our customers currently using our vaporizer system began with their own creations, and changed to the Brooks system after encountering the results of their home-made designs such as: inconsistent yield, chamber pressure spikes, operating expenses that are higher than expected, inability to support changing vapor demand, or safety problems or concerns.
In this video, Ed Fisher provides an overview of one of the larger integrated direct liquid injection vaporizer systems that Brooks Instrument has completed. This fully-automated vapor generation solution provides methyltrichlorosilane (MTS) vapor blended with Hydrogen on demand – whenever and wherever the customer requires vapor. Whether it’s mounted in a cabinet or on a small metal plate, every Brooks vaporizer is configured to meet the exact needs of the application to provide:
Vapor On Demand: The unique method of vaporization used by Brooks provides the fastest on/off vapor flow response available. The dual vaporizer design in the video is also ultra-flexible; allowing the vapor output of two vaporizers to be sent to two different processes, or both vapor outputs can be combined and sent to either individual process whenever there is a spike in vapor demand.
Safe Vapor Generation: As shown in the video, the Brooks design uses color coded labels to identify the system locations that contain hazardous materials, and there are numerous electrical fail-safes and backup systems. The Brooks method of vaporization also does not require a vessel filled with a bubbling, hazardous chemical to generate vapor. All Brooks vaporizer designs are created to maximize operator and equipment safety.
Control of Vapor Costs: The ultra-fast on/off vapor flow control of the Brooks vaporizer minimizes the amount of vapor wasted in the scrubber that isn’t used in the process. The electrical design in the video extends the real-world operating life of the vaporizers, sensitive liquid precursors do not experience thermal decomposition, and additional instrumentation costs for vapor flow controllers are avoided.
You can find out more information about the Brooks direct liquid injection vaporizer by getting in touch with your local Brooks product expert. If you would prefer that the local expert contact you, feel free to enter some information about your application into this form.
Of course, you’re always welcome to call my colleagues and me at Brooks whenever we can be of assistance: 888-554-3569 ext. 3000.
If you’d like to read a bit more about instrumentation and process control, feel free to check out more of my contributions summarized on my Google Plus profile.
After posting the blog about Brooks’ history with NASA this morning, I realized that this blog post about our Quantim’s in space must have been mistakenly deleted at some point, so here it is! Enjoy!
Delivering saline solution to a clinic for medical needs … sounds simple enough, right? Not when that clinic is on the International Space Station, the moon or even Mars. Transporting medical fluids that are manufactured on Earth into space is expensive and logistically challenging. NASA Johnson Space Center knew there had to be a way to manufacture medical fluids in space to alleviate the transportation problems and to make spacecraft more self sufficient, so they called on the microgravity science expertise and spaceflight hardware development know-how of Cleveland, OH based NASA Glenn Research Center and ZIN Technologies, Inc.
While we were cleaning out our offices a few weeks ago a co-worker of mine handed me a great Norman Rockwell oil painting that we used to have hanging in one of our hallways. It was taken down when we were updating our facility. He wasn’t sure what to do with it. The reason we used to have it hanging up in the walls at Brooks (and the reason I’m going to find it another nice home on our walls) is because in the background of the picture you can see some Brooks Sho-Rate variable area flow meters between the two men on the left. Brooks provided Sho-Rate flow meters to NASA for some of the first missions into space. Read more…
Yesterday, during the Chem Show in New York City, our very own Steve Kannengieszer was interviewed by Chemical Processing magazine‘s Senior Digital Editor, Traci Purdum. We’re still waiting for the video but I thought I would share some of the Q&A’s that were covered. If you are at the Chem Show, stop by and see us at booth 303! Read more…
