Many of our customers need to turn liquids into vapor to apply a treatment to an item, or to use vapor as an ingredient to create something. Some specific examples include MOCVD, Atomic Layer Deposition, or Vacuum Polymer Film Deposition. Generating vapor reliably is very difficult, and many users of vapor cobble their own vapor generation system together and assume everything is working as expected. Most of our customers currently using our vaporizer system began with their own creations, and changed to the Brooks system after encountering the results of their home-made designs such as: inconsistent yield, chamber pressure spikes, operating expenses that are higher than expected, inability to support changing vapor demand, or safety problems or concerns.
In this video, Ed Fisher provides an overview of one of the larger integrated direct liquid injection vaporizer systems that Brooks Instrument has completed. This fully-automated vapor generation solution provides methyltrichlorosilane (MTS) vapor blended with Hydrogen on demand – whenever and wherever the customer requires vapor. Whether it’s mounted in a cabinet or on a small metal plate, every Brooks vaporizer is configured to meet the exact needs of the application to provide:
Vapor On Demand: The unique method of vaporization used by Brooks provides the fastest on/off vapor flow response available. The dual vaporizer design in the video is also ultra-flexible; allowing the vapor output of two vaporizers to be sent to two different processes, or both vapor outputs can be combined and sent to either individual process whenever there is a spike in vapor demand.
Safe Vapor Generation: As shown in the video, the Brooks design uses color coded labels to identify the system locations that contain hazardous materials, and there are numerous electrical fail-safes and backup systems. The Brooks method of vaporization also does not require a vessel filled with a bubbling, hazardous chemical to generate vapor. All Brooks vaporizer designs are created to maximize operator and equipment safety.
Control of Vapor Costs: The ultra-fast on/off vapor flow control of the Brooks vaporizer minimizes the amount of vapor wasted in the scrubber that isn’t used in the process. The electrical design in the video extends the real-world operating life of the vaporizers, sensitive liquid precursors do not experience thermal decomposition, and additional instrumentation costs for vapor flow controllers are avoided.
You can find out more information about the Brooks direct liquid injection vaporizer by getting in touch with your local Brooks product expert. If you would prefer that the local expert contact you, feel free to enter some information about your application into this form.
Of course, you’re always welcome to call my colleagues and me at Brooks whenever we can be of assistance: 888-554-3569 ext. 3000.
If you’d like to read a bit more about instrumentation and process control, feel free to check out more of my contributions summarized on my Google Plus profile.