Learn how to correctly evaluate your process so you can specify the right thermal mass flow controller (MFC). Get the free white paper now.
There are four main considerations to evaluate in order to specify a Thermal Mass Flow Controller (MFC) for your application. Flow range, gas conditions, desired accuracy, and communications are all important constraints. There are a five additional considerations including interior finish for high and ultra high purity applications, materials used in the flow path, the environment such as installations near furnaces or some sort of NEMA rating, mounting attitude such as vertical flow up, and serviceability.
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N.K. Glover, Brooks Instrument, Snellville, GA, “Choosing the Right Mass Flow Controller for your Application”, 55th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, pp. 445‐447, 2012. Reproduced by permission of the Society of Vacuum Coaters