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Rotating Equipment
Large rotating equipment requires effective and reliable flow monitoring on a number of fluid supplies – like lubrication fluids, coolants, and dry gas seal gasses – to ensure efficient and safe operation.Brooks metal tube variable area meters – such as the MT3750 shown – are commonly used to monitor lube oil and coolant flows. The optimum solution is using a 4-20 mA transmitting variable area meter so that flow can be continuously monitored. Glass tube or plastic body variable area meters are frequently used to ensure proper flow to dry gas seals. To achieve superior flow accuracy, some customers install Brooks’ latest thermal mass flow meters and controllers – such as the SLAMf series.
Other Application Notes
- Basic Flow Control
- Catalyst Research
- Heat Treating, Cutting/Welding, and other Thermal Processes
- Vacuum Processes
- Bioreactors
- Precision Coatings
- Chemical Injection/Dosing Systems
- Process Analyzer Sample Flow
- Rotating Equipment
- Fuel Cell Test Stand
- Device Testing and Metrology
- Level Measurement
- Physical Vapor Deposition
- Chemical Vapor Deposition, including MOCVD
- Transparent Conducting Oxides
- Polysilicon and Crystal Pulling
- Spray Coatings
